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Title | Author(s) | Issue Date | Views | |
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Mobility improvement of n-MOSFET's with nitrided gate oxide by backsurface Ar+ bombardment Journal:IEEE Electron Device Letters | 1995 | 213 |
Title | Author(s) | Issue Date | Views | |
---|---|---|---|---|
Mobility improvement of n-MOSFET's with nitrided gate oxide by backsurface Ar+ bombardment Journal:IEEE Electron Device Letters | 1995 | 213 |