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Title | Author(s) | Issue Date | Views | |
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Improvement of SiGe oxide grown by electron cyclotron resonance using H2O vapor annealing Journal:Applied Physics Letters | 1996 | 203 |
Title | Author(s) | Issue Date | Views | |
---|---|---|---|---|
Improvement of SiGe oxide grown by electron cyclotron resonance using H2O vapor annealing Journal:Applied Physics Letters | 1996 | 203 |