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Conference Paper: Surface-micromachined mirrors for laser-beam positioning

TitleSurface-micromachined mirrors for laser-beam positioning
Authors
Tien, NCSolgaard, OKiang, MHDaneman, MLau, KYMuller, RS
Issue Date1995
Citation
International Conference On Solid-State Sensors And Actuators, And Eurosensors Ix, Proceedings, 1995, v. 2, p. 352-355 How to Cite?
AbstractWe have designed and fabricated surface-micromachined polysilicon micromirrors for laser-beam positioning. Using microhinge technology to achieve the required vertical dimensions and functionality, two types of beam-steering mirrors have been designed and fabricated. One is intended for precise beam positioning, needed in optical alignment, and the other is appropriate for laser-beam scanning. The fabrication of these devices involves the surface-micromachining of up to four polysilicon layers. Environmental stress testing of the beam-positioning mirror shows a vibration resonance frequency of 29 kHz, negligible changes in position for temperatures between 25 and 200° C, and the capability of handling a 375 mW laser beam at 1.06 μm wavelength.
Persistent Identifierhttp://hdl.handle.net/10722/148990

 

DC FieldValueLanguage
dc.contributor.authorTien, NCen_HK
dc.contributor.authorSolgaard, Oen_HK
dc.contributor.authorKiang, MHen_HK
dc.contributor.authorDaneman, Men_HK
dc.contributor.authorLau, KYen_HK
dc.contributor.authorMuller, RSen_HK
dc.date.accessioned2012-06-20T06:17:43Z-
dc.date.available2012-06-20T06:17:43Z-
dc.date.issued1995en_HK
dc.identifier.citationInternational Conference On Solid-State Sensors And Actuators, And Eurosensors Ix, Proceedings, 1995, v. 2, p. 352-355en_US
dc.identifier.urihttp://hdl.handle.net/10722/148990-
dc.description.abstractWe have designed and fabricated surface-micromachined polysilicon micromirrors for laser-beam positioning. Using microhinge technology to achieve the required vertical dimensions and functionality, two types of beam-steering mirrors have been designed and fabricated. One is intended for precise beam positioning, needed in optical alignment, and the other is appropriate for laser-beam scanning. The fabrication of these devices involves the surface-micromachining of up to four polysilicon layers. Environmental stress testing of the beam-positioning mirror shows a vibration resonance frequency of 29 kHz, negligible changes in position for temperatures between 25 and 200° C, and the capability of handling a 375 mW laser beam at 1.06 μm wavelength.en_HK
dc.languageengen_US
dc.relation.ispartofInternational Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedingsen_HK
dc.titleSurface-micromachined mirrors for laser-beam positioningen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0029547757en_HK
dc.identifier.volume2en_HK
dc.identifier.spage352en_HK
dc.identifier.epage355en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK
dc.identifier.scopusauthoridSolgaard, O=7005609097en_HK
dc.identifier.scopusauthoridKiang, MH=7003422357en_HK
dc.identifier.scopusauthoridDaneman, M=7003552202en_HK
dc.identifier.scopusauthoridLau, KY=7401559989en_HK
dc.identifier.scopusauthoridMuller, RS=7404245946en_HK

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