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Conference Paper: Tunable solenoid microinductors utilizing permalloy electro-thermal vibromotors

TitleTunable solenoid microinductors utilizing permalloy electro-thermal vibromotors
Authors
Shih, WPLi, ZMcCormick, DTTien, NCHui, CY
Issue Date2004
Citation
Proceedings Of The Ieee International Conference On Micro Electro Mechanical Systems (Mems), 2004, p. 793-796 How to Cite?
AbstractThis paper presents a first-of-its-kind micromachined tunable solenoid microinductor with tuning ratio as high as 18:1 at 10kHz. A tuning mechanism using a permalloy linear vibromotor enables low power consumption, low driving voltage (less than 1 volt), and long travel distance. A low temperature batch process is developed to integrate the microinductor structure and vibromotor. The measured inductance is on the order of 10nH and rolls off at 1MHz. Potential applications include performance optimization and functionality enhancement to magnetic microsensors and micromagnetic power devices, such as dc/dc converter.
Persistent Identifierhttp://hdl.handle.net/10722/149013
ISSN
1084-6999
2020 SCImago Journal Rankings: 0.249
References
References in Scopus

 

DC FieldValueLanguage
dc.contributor.authorShih, WPen_HK
dc.contributor.authorLi, Zen_HK
dc.contributor.authorMcCormick, DTen_HK
dc.contributor.authorTien, NCen_HK
dc.contributor.authorHui, CYen_HK
dc.date.accessioned2012-06-20T06:17:51Z-
dc.date.available2012-06-20T06:17:51Z-
dc.date.issued2004en_HK
dc.identifier.citationProceedings Of The Ieee International Conference On Micro Electro Mechanical Systems (Mems), 2004, p. 793-796en_US
dc.identifier.issn1084-6999en_HK
dc.identifier.urihttp://hdl.handle.net/10722/149013-
dc.description.abstractThis paper presents a first-of-its-kind micromachined tunable solenoid microinductor with tuning ratio as high as 18:1 at 10kHz. A tuning mechanism using a permalloy linear vibromotor enables low power consumption, low driving voltage (less than 1 volt), and long travel distance. A low temperature batch process is developed to integrate the microinductor structure and vibromotor. The measured inductance is on the order of 10nH and rolls off at 1MHz. Potential applications include performance optimization and functionality enhancement to magnetic microsensors and micromagnetic power devices, such as dc/dc converter.en_HK
dc.languageengen_US
dc.relation.ispartofProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)en_HK
dc.titleTunable solenoid microinductors utilizing permalloy electro-thermal vibromotorsen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-3042745239en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-3042745239&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.spage793en_HK
dc.identifier.epage796en_HK
dc.publisher.placeUnited Statesen_HK
dc.identifier.scopusauthoridShih, WP=8972649800en_HK
dc.identifier.scopusauthoridLi, Z=24306828000en_HK
dc.identifier.scopusauthoridMcCormick, DT=7202521902en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK
dc.identifier.scopusauthoridHui, CY=7202876972en_HK
dc.identifier.issnl1084-6999-

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