A two-dimensional flow sensor using integrated silicon spreading-resistance temperature detectors

Abstract

A simple silicon two-dimensional (2D) flow sensor for the measurement of both flow direction and speed is described. By integrating two couples of silicon spreading-resistance temperature (SRT) sensors in two perpendicular directions on the surface of a silicon chip, this sensor can detect flow speed and flow direction φ in a full range of 360°. Experimental results confirm theoretical analysis that the output of the sensor increases with the square root of the flow velocity, and the outputs in the two perpendicular directions are proportional to sin φ and cos φ, respectively. The effects of sensor layout are also discussed. With complete oxide isolation for the SRT sensors, the flow sensor could achieve higher sensitivity by operating above the intrinsic temperature of silicon (∼150°C), or could be used to detect fluid flow at a temperature as high as 300°C. © 1997 American Institute of Physics.