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Article: Hotspot-aware fast source and mask optimization

TitleHotspot-aware fast source and mask optimization
Authors
Issue Date2012
Citation
Optics Express, 2012, v. 20 n. 19, p. 21792-21804 How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/185909
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorLI, Jen_US
dc.contributor.authorShen, Yen_US
dc.contributor.authorLam, EYMen_US
dc.date.accessioned2013-08-20T11:44:23Z-
dc.date.available2013-08-20T11:44:23Z-
dc.date.issued2012en_US
dc.identifier.citationOptics Express, 2012, v. 20 n. 19, p. 21792-21804en_US
dc.identifier.urihttp://hdl.handle.net/10722/185909-
dc.languageengen_US
dc.relation.ispartofOptics Expressen_US
dc.titleHotspot-aware fast source and mask optimizationen_US
dc.typeArticleen_US
dc.identifier.emailShen, Y: shenyj@hku.hken_US
dc.identifier.emailLam, EYM: elam@eee.hku.hken_US
dc.identifier.authorityLam, EYM=rp00131en_US
dc.description.naturelink_to_OA_fulltext-
dc.identifier.doi10.1364/OE.20.021792-
dc.identifier.scopuseid_2-s2.0-84866252597-
dc.identifier.hkuros220479en_US
dc.identifier.volume20en_US
dc.identifier.spage21792en_US
dc.identifier.epage21804en_US
dc.identifier.isiWOS:000308865600119-

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