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- Publisher Website: 10.1364/OE.20.021792
- Scopus: eid_2-s2.0-84866252597
- WOS: WOS:000308865600119
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Article: Hotspot-aware fast source and mask optimization
Title | Hotspot-aware fast source and mask optimization |
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Authors | |
Issue Date | 2012 |
Citation | Optics Express, 2012, v. 20 n. 19, p. 21792-21804 How to Cite? |
Persistent Identifier | http://hdl.handle.net/10722/185909 |
ISI Accession Number ID |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | LI, J | en_US |
dc.contributor.author | Shen, Y | en_US |
dc.contributor.author | Lam, EYM | en_US |
dc.date.accessioned | 2013-08-20T11:44:23Z | - |
dc.date.available | 2013-08-20T11:44:23Z | - |
dc.date.issued | 2012 | en_US |
dc.identifier.citation | Optics Express, 2012, v. 20 n. 19, p. 21792-21804 | en_US |
dc.identifier.uri | http://hdl.handle.net/10722/185909 | - |
dc.language | eng | en_US |
dc.relation.ispartof | Optics Express | en_US |
dc.title | Hotspot-aware fast source and mask optimization | en_US |
dc.type | Article | en_US |
dc.identifier.email | Shen, Y: shenyj@hku.hk | en_US |
dc.identifier.email | Lam, EYM: elam@eee.hku.hk | en_US |
dc.identifier.authority | Lam, EYM=rp00131 | en_US |
dc.description.nature | link_to_OA_fulltext | - |
dc.identifier.doi | 10.1364/OE.20.021792 | - |
dc.identifier.scopus | eid_2-s2.0-84866252597 | - |
dc.identifier.hkuros | 220479 | en_US |
dc.identifier.volume | 20 | en_US |
dc.identifier.spage | 21792 | en_US |
dc.identifier.epage | 21804 | en_US |
dc.identifier.isi | WOS:000308865600119 | - |