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Article: Level-set-based inverse lithography for mask synthesis using the conjugate gradient and an optimal time step

TitleLevel-set-based inverse lithography for mask synthesis using the conjugate gradient and an optimal time step
Authors
Lv, WLiu, SXia, QWu, XShen, YLam, EYM
Issue Date2013
PublisherAmerican Vacuum Society. The Journal's web site is located at http://avspublications.org/jvstb/
Citation
Journal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics, 2013, v. 31 n. 4, article no. 041605, p. 1-13 How to Cite?
DOI: http://dx.doi.org/10.1116/1.4813781
Persistent Identifierhttp://hdl.handle.net/10722/200624
ISSN
2166-2746
2021 Impact Factor: 1.572
2020 SCImago Journal Rankings: 0.429
ISI Accession Number ID
WOS:000322379800028

 

DC FieldValueLanguage
dc.contributor.authorLv, Wen_US
dc.contributor.authorLiu, Sen_US
dc.contributor.authorXia, Qen_US
dc.contributor.authorWu, Xen_US
dc.contributor.authorShen, Yen_US
dc.contributor.authorLam, EYMen_US
dc.date.accessioned2014-08-21T06:52:44Z-
dc.date.available2014-08-21T06:52:44Z-
dc.date.issued2013en_US
dc.identifier.citationJournal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics, 2013, v. 31 n. 4, article no. 041605, p. 1-13-
dc.identifier.issn2166-2746-
dc.identifier.urihttp://hdl.handle.net/10722/200624-
dc.languageengen_US
dc.publisherAmerican Vacuum Society. The Journal's web site is located at http://avspublications.org/jvstb/-
dc.relation.ispartofJournal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronicsen_US
dc.rightsCopyright 2013 American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society. The following article appeared in Journal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics, 2013, v. 31 n. 4, article no. 041605, p. 1-13 and may be found at https://doi.org/10.1116/1.4813781-
dc.titleLevel-set-based inverse lithography for mask synthesis using the conjugate gradient and an optimal time stepen_US
dc.typeArticleen_US
dc.identifier.emailLv, W: wenlv@hku.hken_US
dc.identifier.emailShen, Y: shenyj@hku.hken_US
dc.identifier.emailLam, EYM: elam@eee.hku.hken_US
dc.identifier.authorityLam, EYM=rp00131en_US
dc.description.naturepublished_or_final_version-
dc.identifier.doi10.1116/1.4813781-
dc.identifier.scopuseid_2-s2.0-84887426786-
dc.identifier.hkuros233679en_US
dc.identifier.volume31-
dc.identifier.issue4-
dc.identifier.spagearticle no. 041605, p. 1-
dc.identifier.epagearticle no. 041605, p. 13-
dc.identifier.isiWOS:000322379800028-
dc.publisher.placeUnited States-
dc.identifier.issnl2166-2746-

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