Laser-induced vibrations of micro-beams under different boundary conditions

Abstract

In this study, the vibration phenomenon during pulsed laser heating of a micro-beam is investigated. The beam is made of silicon and is heated by a non-Gaussian laser beam with a pulse duration of 2 ps, which incites vibration due to the thermoelastic damping effect. The coupling between the temperature field and stress field induces energy dissipation and converts mechanical energy into heat energy, which is irreversible. An analytical-numerical technique based on the Laplace transform is used to calculate the vibration of the deflection and thermal moment. A general algorithm of the inverse Laplace transform is developed. The validation of this algorithm is obtained through comparison with numerical results obtained by the FEMLAB software package. The effect of laser pulse energy absorption depth is studied. The size effect and the effect of different boundary conditions are also analyzed. Finally, the damping ratio and resonant frequency shift ratio of beams due to the air damping effect and the thermoelastic damping effect are compared. © 2007 Elsevier Ltd. All rights reserved.