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Title | Author(s) | Issue Date | Views | |
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Depth profiling of Si nanocrystals in Si-implanted SiO2 films by spectroscopic ellipsometry Journal:Applied Physics Letters | 2003 | 180 |
Title | Author(s) | Issue Date | Views | |
---|---|---|---|---|
Depth profiling of Si nanocrystals in Si-implanted SiO2 films by spectroscopic ellipsometry Journal:Applied Physics Letters | 2003 | 180 |