Showing results 1 to 4 of 4
Title | Author(s) | Issue Date | Views | |
---|---|---|---|---|
A novel distributed system for plasma immersion ion implanter control and automation Journal:Review of Scientific Instruments | 1998 | 99 | ||
1991 | 163 | |||
Principles and characteristics of a new generation plasma immersion ion implanter Journal:Review of Scientific Instruments | 1997 | 179 | ||
Special modulator for high frequency, low-voltage plasma immersion ion implantation Journal:Review of Scientific Instruments | 1999 | 107 |