Showing results 1 to 3 of 3
| Title | Author(s) | Issue Date | Views | |
|---|---|---|---|---|
Modeling and characterization of micromachined bi-directional electro-thermal vibromotors Proceeding/Conference:American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS) | 2003 | 112 | ||
Tunable solenoid microinductors utilizing permalloy electro-thermal vibromotors Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2004 | 113 | ||
A unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and composition Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2004 | 118 |