Showing results 2 to 3 of 3
< previous
| Title | Author(s) | Issue Date | Views | |
|---|---|---|---|---|
Tunable solenoid microinductors utilizing permalloy electro-thermal vibromotors Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2004 | 113 | ||
A unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and composition Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2004 | 118 |