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Title | Author(s) | Issue Date | Views | |
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Electrical and structural properties of shallow p + junctions formed by dual (Ga/B) ion implantation Journal:Applied Physics Letters | 1990 | 168 |
Title | Author(s) | Issue Date | Views | |
---|---|---|---|---|
Electrical and structural properties of shallow p + junctions formed by dual (Ga/B) ion implantation Journal:Applied Physics Letters | 1990 | 168 |