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- Publisher Website: 10.1109/TRANSDUCERS.2011.5969837
- Scopus: eid_2-s2.0-80052104787
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Conference Paper: Silicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modes
Title | Silicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modes |
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Authors | |
Keywords | Membrane Nanoelectromechanical Systems Resonator Silicon Carbide (SiC) Vibrational Modes |
Issue Date | 2011 |
Citation | 2011 16Th International Solid-State Sensors, Actuators And Microsystems Conference, Transducers'11, 2011, p. 2614-2617 How to Cite? |
Abstract | We report on experimental demonstration of a new type of nanomechanical resonators based on very thin silicon carbide (SiC) square membranes. An optical interferometry with a radio-frequency two-port measurement scheme enables sensitive and efficient detection of many vibrational modes of the membranes. Membranes with sizes up to 1mm × 1mm and thicknesses down to t ≤ 500nm, offer very high aspect ratios and compelling resonance spectra of multiple-mode operations from kHz range to the HF (3-30MHz) band. Typical resonances have Q's ∼ 800-30000 at room temperature and in vacuum of ∼20mTorr. Some high-Q modes exhibit fairly strong nonlinear effects. © 2011 IEEE. |
Persistent Identifier | http://hdl.handle.net/10722/149034 |
References |
DC Field | Value | Language |
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dc.contributor.author | Barnes, AC | en_HK |
dc.contributor.author | Roberts, RC | en_HK |
dc.contributor.author | Tien, NC | en_HK |
dc.contributor.author | Zorman, CA | en_HK |
dc.contributor.author | Feng, PXL | en_HK |
dc.date.accessioned | 2012-06-20T06:18:00Z | - |
dc.date.available | 2012-06-20T06:18:00Z | - |
dc.date.issued | 2011 | en_HK |
dc.identifier.citation | 2011 16Th International Solid-State Sensors, Actuators And Microsystems Conference, Transducers'11, 2011, p. 2614-2617 | en_US |
dc.identifier.uri | http://hdl.handle.net/10722/149034 | - |
dc.description.abstract | We report on experimental demonstration of a new type of nanomechanical resonators based on very thin silicon carbide (SiC) square membranes. An optical interferometry with a radio-frequency two-port measurement scheme enables sensitive and efficient detection of many vibrational modes of the membranes. Membranes with sizes up to 1mm × 1mm and thicknesses down to t ≤ 500nm, offer very high aspect ratios and compelling resonance spectra of multiple-mode operations from kHz range to the HF (3-30MHz) band. Typical resonances have Q's ∼ 800-30000 at room temperature and in vacuum of ∼20mTorr. Some high-Q modes exhibit fairly strong nonlinear effects. © 2011 IEEE. | en_HK |
dc.language | eng | en_US |
dc.relation.ispartof | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 | en_HK |
dc.subject | Membrane | en_HK |
dc.subject | Nanoelectromechanical Systems | en_HK |
dc.subject | Resonator | en_HK |
dc.subject | Silicon Carbide (SiC) | en_HK |
dc.subject | Vibrational Modes | en_HK |
dc.title | Silicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modes | en_HK |
dc.type | Conference_Paper | en_HK |
dc.identifier.email | Roberts, RC: rcr8@hku.hk | en_HK |
dc.identifier.email | Tien, NC: nctien@hku.hk | en_HK |
dc.identifier.authority | Roberts, RC=rp01738 | en_HK |
dc.identifier.authority | Tien, NC=rp01604 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.doi | 10.1109/TRANSDUCERS.2011.5969837 | en_HK |
dc.identifier.scopus | eid_2-s2.0-80052104787 | en_HK |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-80052104787&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.spage | 2614 | en_HK |
dc.identifier.epage | 2617 | en_HK |
dc.identifier.scopusauthorid | Barnes, AC=50161093900 | en_HK |
dc.identifier.scopusauthorid | Roberts, RC=24466830100 | en_HK |
dc.identifier.scopusauthorid | Tien, NC=7006532826 | en_HK |
dc.identifier.scopusauthorid | Zorman, CA=7005077073 | en_HK |
dc.identifier.scopusauthorid | Feng, PXL=48761150300 | en_HK |