Showing results 2 to 3 of 3
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Title | Author(s) | Issue Date | |
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Plasmonic lithography Proceeding/Conference:Proceedings of the 3rd ASME Integrated Nanosystems Conference - Design, Synthesis, and Applications | 2004 | ||
Sub-100 nm lithography using ultrashort wavelength of surface plasmons Journal:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 2004 |