Showing results 1 to 1 of 1
| Title | Author(s) | Issue Date | |
|---|---|---|---|
On the sub-nm EOT scaling of high-κ gate stacks Proceeding/Conference:ULIS 2008 - 9th International Conference on ULtimate Integration of Silicon | 2008 |
| Title | Author(s) | Issue Date | |
|---|---|---|---|
On the sub-nm EOT scaling of high-κ gate stacks Proceeding/Conference:ULIS 2008 - 9th International Conference on ULtimate Integration of Silicon | 2008 |