Browsing by Author Murphy, P

Jump to: 0-9 A B C D E F G H I J K L M N O P Q R S T U V W X Y Z 中
Showing results 4 to 4 of 4 < previous 
TitleAuthor(s)Issue Date
 
Self-limited self-perfection by liquefaction for sub-20nm trench/line fabrication
Journal:Nanotechnology
Liang, YMurphy, PLi, WDChou, SY
2009
Showing results 4 to 4 of 4 < previous