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Title | Author(s) | Issue Date | |
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Ultra-shallow n +p junction formed by PH 3 and AsH 3 plasma immersion ion implantation Journal:Microelectronics Reliability | 2002 |
Title | Author(s) | Issue Date | |
---|---|---|---|
Ultra-shallow n +p junction formed by PH 3 and AsH 3 plasma immersion ion implantation Journal:Microelectronics Reliability | 2002 |