Showing results 1 to 2 of 2
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Electrical breakdown across micron scale gaps in MEMS structures Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering | 2006 | ||
Electrical breakdown response for multiple-gap MEMS structures Proceeding/Conference:IEEE International Reliability Physics Symposium Proceedings | 2006 |