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Browsing by Author Hao, Yigang
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Showing results 1 to 1 of 1
Title
Author(s)
Issue Date
Fabrication and Electrical Characterization of High Aspect Ratio Through-Silicon Vias with Polyimide Liner for 3D Integration
Journal:
Micromachines
Chen, Xuyan
Chen, Zhiming
Xiao, Lei
Hao, Yigang
Wang, Han
Ding, Yingtao
Zhang, Ziyue
2022