Browsing by Author Mak, GYH

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TitleAuthor(s)Issue Date
Deep etch of GaN by laser micromachining
Proceeding/Conference:Physica Status Solidi (C) Current Topics in Solid State Physics
2009
 
Placement sensitivity to aberration in optical imaging
Proceeding/Conference:IEEE Conference on Electron Devices and Solid-State Circuits
2003
 
Sensitivity of 1D mask features towards aberration in photolithography
Proceeding/Conference:Regional Inter-University Postgraduate Electrical and Electronic Engineering Conference
2003