Showing results 1 to 3 of 3
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Electrical breakdown across micron scale gaps in MEMS structures Proceeding/Conference:Proceedings of SPIE - The International Society for Optical Engineering | 2006 | ||
Electrical breakdown response for multiple-gap MEMS structures Proceeding/Conference:IEEE International Reliability Physics Symposium Proceedings | 2006 | ||
Electrical discharge across micrometer-scale gaps for planar MEMS structures in air at atmospheric pressure Journal:Journal of Micromechanics and Microengineering | 2008 |