High-Stability and High-Sensitivity MISiC Hydrogen Sensor by using Hf-based Gate Dielectrics
Grant Data
Project Title
High-Stability and High-Sensitivity MISiC Hydrogen Sensor by using Hf-based Gate Dielectrics
Principal Investigator
Professor Lai, Pui To
(Principal Investigator (PI))
Duration
30
Start Date
2011-01-01
Amount
602000
Conference Title
High-Stability and High-Sensitivity MISiC Hydrogen Sensor by using Hf-based Gate Dielectrics
Presentation Title
Keywords
device, dielectric, semconductor
Discipline
Electronics
Panel
Engineering (E)
HKU Project Code
HKU 713510E
Grant Type
General Research Fund (GRF)
Funding Year
2010
Status
Completed
All Publications
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Hydrogen gas sensing properties of Pt/Ta2O5 Schottky diodes based on Si and SiC substrates Proceeding/Conference:Sensors and Actuators A: Physical | 2011 |