Study on High-resolution Nanoimprint Lithography Template Fabrication using Scanning Focused Helium Ion Beam

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Grant Data
Project Title
Study on High-resolution Nanoimprint Lithography Template Fabrication using Scanning Focused Helium Ion Beam
Principal Investigator
Professor Li, Wendi   (Principal Investigator (PI))
Duration
36
Start Date
2014-01-01
Completion Date
2016-12-31
Amount
314000
Conference Title
Study on High-resolution Nanoimprint Lithography Template Fabrication using Scanning Focused Helium Ion Beam
Keywords
Helium Ion Beam, Nanoimprint Lithography, Template Fabrication
Discipline
Production and Manufacturing
Panel
Engineering (E)
HKU Project Code
61306123
Grant Type
National Natural Science Foundation of China (NSFC) - Science Fund for Young Scholars
Funding Year
2013
Status
Completed