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Article: Calculation of electrostatic forces and torques in MEMS using path-independent integrals

TitleCalculation of electrostatic forces and torques in MEMS using path-independent integrals
Authors
Hui, CYYeh, JLATien, NC
Issue Date2000
PublisherInstitute of Physics Publishing. The Journal's web site is located at http://www.iop.org/journals/jmm
Citation
Journal Of Micromechanics And Microengineering, 2000, v. 10 n. 3, p. 477-482 How to Cite?
DOI: http://dx.doi.org/10.1088/0960-1317/10/3/325
AbstractSurface- or path-independent integrals based on the Maxwell stress tensor can be used to compute the forces and torques on micromachined electrostatic devices. The connection of these integrals with charge concentration near the edge of thin plate-like devices (combdrives) is discussed. To illustrate the use of these path-independent integrals, the force acting on a periodic array of asymmetric combdrives is evaluated.
Persistent Identifierhttp://hdl.handle.net/10722/148941
ISSN
0960-1317
2021 Impact Factor: 2.282
2020 SCImago Journal Rankings: 0.494
ISI Accession Number ID
WOS:000089362900026
References
References in Scopus

 

DC FieldValueLanguage
dc.contributor.authorHui, CYen_HK
dc.contributor.authorYeh, JLAen_HK
dc.contributor.authorTien, NCen_HK
dc.date.accessioned2012-06-20T06:16:57Z-
dc.date.available2012-06-20T06:16:57Z-
dc.date.issued2000en_HK
dc.identifier.citationJournal Of Micromechanics And Microengineering, 2000, v. 10 n. 3, p. 477-482en_HK
dc.identifier.issn0960-1317en_HK
dc.identifier.urihttp://hdl.handle.net/10722/148941-
dc.description.abstractSurface- or path-independent integrals based on the Maxwell stress tensor can be used to compute the forces and torques on micromachined electrostatic devices. The connection of these integrals with charge concentration near the edge of thin plate-like devices (combdrives) is discussed. To illustrate the use of these path-independent integrals, the force acting on a periodic array of asymmetric combdrives is evaluated.en_HK
dc.languageengen_US
dc.publisherInstitute of Physics Publishing. The Journal's web site is located at http://www.iop.org/journals/jmmen_HK
dc.relation.ispartofJournal of Micromechanics and Microengineeringen_HK
dc.titleCalculation of electrostatic forces and torques in MEMS using path-independent integralsen_HK
dc.typeArticleen_HK
dc.identifier.emailTien, NC: nctien@hku.hken_HK
dc.identifier.authorityTien, NC=rp01604en_HK
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.doi10.1088/0960-1317/10/3/325en_HK
dc.identifier.scopuseid_2-s2.0-0034272728en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-0034272728&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume10en_HK
dc.identifier.issue3en_HK
dc.identifier.spage477en_HK
dc.identifier.epage482en_HK
dc.identifier.isiWOS:000089362900026-
dc.publisher.placeUnited Kingdomen_HK
dc.identifier.scopusauthoridHui, CY=7202876972en_HK
dc.identifier.scopusauthoridYeh, JLA=7201895883en_HK
dc.identifier.scopusauthoridTien, NC=7006532826en_HK
dc.identifier.issnl0960-1317-

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