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Article: Force based displacement measurement in micromechanical devices
Title | Force based displacement measurement in micromechanical devices |
---|---|
Authors | |
Issue Date | 2001 |
Publisher | American Institute of Physics. The Journal's web site is located at http://apl.aip.org/ |
Citation | Applied Physics Letters, 2001, v. 78 n. 25, p. 4031-4033 How to Cite? |
Abstract | We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm. © 2001 American Institute of Physics. |
Persistent Identifier | http://hdl.handle.net/10722/148949 |
ISSN | 2023 Impact Factor: 3.5 2023 SCImago Journal Rankings: 0.976 |
ISI Accession Number ID | |
References |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | O'Shea, SJ | en_HK |
dc.contributor.author | Ng, CK | en_HK |
dc.contributor.author | Tan, YY | en_HK |
dc.contributor.author | Xu, Y | en_HK |
dc.contributor.author | Tay, EH | en_HK |
dc.contributor.author | Chua, BL | en_HK |
dc.contributor.author | Tien, NC | en_HK |
dc.contributor.author | Tang, XS | en_HK |
dc.contributor.author | Chen, WT | en_HK |
dc.date.accessioned | 2012-06-20T06:17:00Z | - |
dc.date.available | 2012-06-20T06:17:00Z | - |
dc.date.issued | 2001 | en_HK |
dc.identifier.citation | Applied Physics Letters, 2001, v. 78 n. 25, p. 4031-4033 | - |
dc.identifier.issn | 0003-6951 | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/148949 | - |
dc.description.abstract | We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm. © 2001 American Institute of Physics. | en_HK |
dc.language | eng | en_US |
dc.publisher | American Institute of Physics. The Journal's web site is located at http://apl.aip.org/ | en_HK |
dc.relation.ispartof | Applied Physics Letters | en_HK |
dc.title | Force based displacement measurement in micromechanical devices | en_HK |
dc.type | Article | en_HK |
dc.identifier.email | Tien, NC: nctien@hku.hk | en_HK |
dc.identifier.authority | Tien, NC=rp01604 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.doi | 10.1063/1.1380398 | en_HK |
dc.identifier.scopus | eid_2-s2.0-17844395442 | en_HK |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-17844395442&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.volume | 78 | en_HK |
dc.identifier.issue | 25 | en_HK |
dc.identifier.spage | 4031 | en_HK |
dc.identifier.epage | 4033 | en_HK |
dc.identifier.isi | WOS:000169339800036 | - |
dc.publisher.place | United States | en_HK |
dc.identifier.scopusauthorid | O'Shea, SJ=7006596987 | en_HK |
dc.identifier.scopusauthorid | Ng, CK=7401705606 | en_HK |
dc.identifier.scopusauthorid | Tan, YY=8930738500 | en_HK |
dc.identifier.scopusauthorid | Xu, Y=7406452606 | en_HK |
dc.identifier.scopusauthorid | Tay, EH=7004902861 | en_HK |
dc.identifier.scopusauthorid | Chua, BL=36973839300 | en_HK |
dc.identifier.scopusauthorid | Tien, NC=7006532826 | en_HK |
dc.identifier.scopusauthorid | Tang, XS=7404101531 | en_HK |
dc.identifier.scopusauthorid | Chen, WT=7409643518 | en_HK |
dc.identifier.issnl | 0003-6951 | - |