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Conference Paper: Linear microvibromotor for positioning optical components
Title | Linear microvibromotor for positioning optical components |
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Authors | |
Issue Date | 1995 |
Citation | Proceedings Of The Ieee Micro Electro Mechanical Systems, 1995, p. 55-60 How to Cite? |
Abstract | We report an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology. The vibromotor has submicron positioning resolution and a travel range exceeding 100 μm. This device is characterized and a simple simulation of its dynamics is presented. |
Persistent Identifier | http://hdl.handle.net/10722/148988 |
DC Field | Value | Language |
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dc.contributor.author | Daneman, MJ | en_HK |
dc.contributor.author | Tien, NC | en_HK |
dc.contributor.author | Solgaard, O | en_HK |
dc.contributor.author | Pisano, AP | en_HK |
dc.contributor.author | Lau, KY | en_HK |
dc.contributor.author | Muller, RS | en_HK |
dc.date.accessioned | 2012-06-20T06:17:42Z | - |
dc.date.available | 2012-06-20T06:17:42Z | - |
dc.date.issued | 1995 | en_HK |
dc.identifier.citation | Proceedings Of The Ieee Micro Electro Mechanical Systems, 1995, p. 55-60 | en_US |
dc.identifier.uri | http://hdl.handle.net/10722/148988 | - |
dc.description.abstract | We report an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology. The vibromotor has submicron positioning resolution and a travel range exceeding 100 μm. This device is characterized and a simple simulation of its dynamics is presented. | en_HK |
dc.language | eng | en_US |
dc.relation.ispartof | Proceedings of the IEEE Micro Electro Mechanical Systems | en_HK |
dc.title | Linear microvibromotor for positioning optical components | en_HK |
dc.type | Conference_Paper | en_HK |
dc.identifier.email | Tien, NC: nctien@hku.hk | en_HK |
dc.identifier.authority | Tien, NC=rp01604 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.scopus | eid_2-s2.0-0029179039 | en_HK |
dc.identifier.spage | 55 | en_HK |
dc.identifier.epage | 60 | en_HK |
dc.identifier.scopusauthorid | Daneman, MJ=7003552202 | en_HK |
dc.identifier.scopusauthorid | Tien, NC=7006532826 | en_HK |
dc.identifier.scopusauthorid | Solgaard, O=7005609097 | en_HK |
dc.identifier.scopusauthorid | Pisano, AP=7103194270 | en_HK |
dc.identifier.scopusauthorid | Lau, KY=7401559989 | en_HK |
dc.identifier.scopusauthorid | Muller, RS=7404245946 | en_HK |