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Conference Paper: Fabrication of biomimetic 3-D structured diaphragms
Title | Fabrication of biomimetic 3-D structured diaphragms |
---|---|
Authors | |
Keywords | 3-D structured diaphragms Biomimetic devices Directional sensitivity Silicon oxide blocks |
Issue Date | 2002 |
Publisher | Elsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/sna |
Citation | Sensors And Actuators, A: Physical, 2002, v. 97-98, p. 448-456 How to Cite? |
Abstract | We report on a new approach to the fabrication of 3-D structured diaphragms using integrated surface and deep reactive ion etching (DRIE) bulk silicon micromachining on a silicon-on-insulator (SOI) wafer. Polysilicon diaphragms of 1 mm × 2 mm × 1.2 μm, and 1 mm × 2 mm × 2.4 μm parylene diaphragms, which are designed for a biomimetic directional microphone and a differential microphone, respectively have been successfully fabricated by our method. The membranes have 20 μm-thick silicon proof masses, solid stiffeners, hollow stiffeners, and 20 μm-deep corrugations to mimic the tympanal membranes of the fly's ears. Acoustic measurements of the diaphragm using laser vibrometry have demonstrated high directional sensitivity of the device. |
Persistent Identifier | http://hdl.handle.net/10722/149000 |
ISSN | 2023 Impact Factor: 4.1 2023 SCImago Journal Rankings: 0.788 |
ISI Accession Number ID | |
References |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yoo, K | en_HK |
dc.contributor.author | Gibbons, C | en_HK |
dc.contributor.author | Su, QT | en_HK |
dc.contributor.author | Miles, RN | en_HK |
dc.contributor.author | Tien, NC | en_HK |
dc.date.accessioned | 2012-06-20T06:17:47Z | - |
dc.date.available | 2012-06-20T06:17:47Z | - |
dc.date.issued | 2002 | en_HK |
dc.identifier.citation | Sensors And Actuators, A: Physical, 2002, v. 97-98, p. 448-456 | en_US |
dc.identifier.issn | 0924-4247 | en_HK |
dc.identifier.uri | http://hdl.handle.net/10722/149000 | - |
dc.description.abstract | We report on a new approach to the fabrication of 3-D structured diaphragms using integrated surface and deep reactive ion etching (DRIE) bulk silicon micromachining on a silicon-on-insulator (SOI) wafer. Polysilicon diaphragms of 1 mm × 2 mm × 1.2 μm, and 1 mm × 2 mm × 2.4 μm parylene diaphragms, which are designed for a biomimetic directional microphone and a differential microphone, respectively have been successfully fabricated by our method. The membranes have 20 μm-thick silicon proof masses, solid stiffeners, hollow stiffeners, and 20 μm-deep corrugations to mimic the tympanal membranes of the fly's ears. Acoustic measurements of the diaphragm using laser vibrometry have demonstrated high directional sensitivity of the device. | en_HK |
dc.language | eng | en_US |
dc.publisher | Elsevier SA. The Journal's web site is located at http://www.elsevier.com/locate/sna | en_HK |
dc.relation.ispartof | Sensors and Actuators, A: Physical | en_HK |
dc.subject | 3-D structured diaphragms | en_HK |
dc.subject | Biomimetic devices | en_HK |
dc.subject | Directional sensitivity | en_HK |
dc.subject | Silicon oxide blocks | en_HK |
dc.title | Fabrication of biomimetic 3-D structured diaphragms | en_HK |
dc.type | Conference_Paper | en_HK |
dc.identifier.email | Tien, NC: nctien@hku.hk | en_HK |
dc.identifier.authority | Tien, NC=rp01604 | en_HK |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.doi | 10.1016/S0924-4247(01)00808-1 | en_HK |
dc.identifier.scopus | eid_2-s2.0-0036544028 | en_HK |
dc.relation.references | http://www.scopus.com/mlt/select.url?eid=2-s2.0-0036544028&selection=ref&src=s&origin=recordpage | en_HK |
dc.identifier.volume | 97-98 | en_HK |
dc.identifier.spage | 448 | en_HK |
dc.identifier.epage | 456 | en_HK |
dc.identifier.isi | WOS:000176297000062 | - |
dc.publisher.place | Switzerland | en_HK |
dc.identifier.scopusauthorid | Yoo, K=7202592782 | en_HK |
dc.identifier.scopusauthorid | Gibbons, C=7007091359 | en_HK |
dc.identifier.scopusauthorid | Su, QT=7201716143 | en_HK |
dc.identifier.scopusauthorid | Miles, RN=7201460593 | en_HK |
dc.identifier.scopusauthorid | Tien, NC=7006532826 | en_HK |
dc.identifier.issnl | 0924-4247 | - |