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Article: Single-digit nanometer nanoimprint templates
Title | Single-digit nanometer nanoimprint templates |
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Authors | |
Issue Date | 2013 |
Publisher | SPIE. The SPIE Newsroom website is located at https://spie.org/x1004.xml |
Citation | SPIE Newsroom, 2013 (30 July 2013) How to Cite? |
Persistent Identifier | http://hdl.handle.net/10722/185965 |
ISSN |
DC Field | Value | Language |
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dc.contributor.author | Li, W | en_US |
dc.contributor.author | Wu, W | en_US |
dc.contributor.author | Williams, RS | en_US |
dc.date.accessioned | 2013-08-20T11:48:11Z | - |
dc.date.available | 2013-08-20T11:48:11Z | - |
dc.date.issued | 2013 | en_US |
dc.identifier.citation | SPIE Newsroom, 2013 (30 July 2013) | en_US |
dc.identifier.issn | 1818-2259 | - |
dc.identifier.uri | http://hdl.handle.net/10722/185965 | - |
dc.language | eng | en_US |
dc.publisher | SPIE. The SPIE Newsroom website is located at https://spie.org/x1004.xml | - |
dc.relation.ispartof | SPIE Newsroom | en_US |
dc.title | Single-digit nanometer nanoimprint templates | en_US |
dc.type | Article | en_US |
dc.identifier.email | Li, W: liwd@hku.hk | en_US |
dc.identifier.authority | Li, W=rp01581 | en_US |
dc.description.nature | link_to_OA_fulltext | - |
dc.identifier.doi | 10.1117/2.1201307.004975 | - |
dc.identifier.hkuros | 220427 | en_US |
dc.identifier.issnl | 1818-2259 | - |