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Article: Soft X-ray-assisted detection method for airborne molecular contaminations (AMCs)

TitleSoft X-ray-assisted detection method for airborne molecular contaminations (AMCs)
Authors
Kim, CZuo, ZFinger, HHaep, SAsbach, CFissan, HPui, DY
KeywordsAirborne molecular contamination (AMC)
Environmental and health effects
Gas-to-particle conversion
Granular-activated carbon (GAC)
Instrumentation
Semiconductor manufacturing
Soft X-ray
Issue Date2015
Citation
Journal of Nanoparticle Research, 2015, v. 17, article no. 126 How to Cite?
DOI: http://dx.doi.org/10.1007/s11051-015-2936-2
Persistent Identifierhttp://hdl.handle.net/10722/209400
ISSN
1388-0764
2023 Impact Factor: 2.1
2023 SCImago Journal Rankings: 0.416
ISI Accession Number ID
WOS:000355016800002

 

DC FieldValueLanguage
dc.contributor.authorKim, Cen_US
dc.contributor.authorZuo, Zen_US
dc.contributor.authorFinger, Hen_US
dc.contributor.authorHaep, Sen_US
dc.contributor.authorAsbach, Cen_US
dc.contributor.authorFissan, Hen_US
dc.contributor.authorPui, DYen_US
dc.date.accessioned2015-04-17T05:15:31Z-
dc.date.available2015-04-17T05:15:31Z-
dc.date.issued2015en_US
dc.identifier.citationJournal of Nanoparticle Research, 2015, v. 17, article no. 126en_US
dc.identifier.issn1388-0764-
dc.identifier.urihttp://hdl.handle.net/10722/209400-
dc.languageengen_US
dc.relation.ispartofJournal of Nanoparticle Researchen_US
dc.subjectAirborne molecular contamination (AMC)-
dc.subjectEnvironmental and health effects-
dc.subjectGas-to-particle conversion-
dc.subjectGranular-activated carbon (GAC)-
dc.subjectInstrumentation-
dc.subjectSemiconductor manufacturing-
dc.subjectSoft X-ray-
dc.titleSoft X-ray-assisted detection method for airborne molecular contaminations (AMCs)en_US
dc.typeArticleen_US
dc.identifier.emailPui, DY: dyhpui@hku.hken_US
dc.identifier.doi10.1007/s11051-015-2936-2en_US
dc.identifier.scopuseid_2-s2.0-84924663000-
dc.identifier.hkuros242755en_US
dc.identifier.volume17en_US
dc.identifier.spagearticle no. 126en_US
dc.identifier.epagearticle no. 126en_US
dc.identifier.eissn1572-896X-
dc.identifier.isiWOS:000355016800002-
dc.identifier.issnl1388-0764-

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