An AFM based nanomanipulation system with 3D nano forces feedback

Abstract

In the AFM based nanomanipulation, the main problem is the lack of real-time sensory feedback for an operator, which makes the manipulation almost in the dark and inefficient. For solving this problem, the AFM probe micro cantilever-tip is used not only as an end effector but also as a 3D nano forces sensor for sensing the interactive nano forces between the AFM probe tip and the object or substrate in nanomanipulation. In addition, for a sample-scanning AFM even with a strain gauge position feedback sensor for x-y close-loop displacement control of sample stage, scanning size error will still be generated, which is destructive to lateral positioning accuracy of AFM probe. For improving probe lateral positioning accuracy, an error compensating method is adopted according to system error quantitative analysis based on the authors' previous work. With 3D nano forces sensing through a haptic/force device and probe positioning accuracy improvement, the efficiency and accuracy of nano manipulation can be significantly Improved. Experiments are presented to verify the effectiveness of the nanomanipulation system.