AFM based nanomanipulation system with 3D force feedback

Abstract

Due to the lack of real-time sensory information feedback during atomic force microscope (AFM) based nanomanipulation, the manipulation is performed with low efficiency and less flexibility, and AFM probe is also prone to break. To solve this problem, the model of nano forces acting on probe and cantilever deflection was proposed. The real-time three dimensional (3D) nano forces are obtained from cantilever deflections measured by position sensing detector (PSD) using new parameter calibration method. The 3D nano forces are magnified proportionally and sent to a haptic/force device for operator to feel, then the operator can adjust the forces acting on the probe and probe motion trajectory in real time. Thus the efficiency and flexibility of nanomanipulation can be significantly improved and the probe can be protected from being broken. The nanolithography and MWCNT pushing experiments have verified the effectiveness of the system.