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Conference Paper: Dynamic force measurement for microassembly of surface MEMS structures
Title | Dynamic force measurement for microassembly of surface MEMS structures |
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Authors | |
Issue Date | 2005 |
Citation | 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO, 2005, v. 2005, p. 646-651 How to Cite? |
Abstract | In-situ PVDF films bonded to the surface of flexible cantilever structure act as the effective micro-force sensors, they are mostly modelled using quasi-static relationship. However, such sensors are usually a significantly compliant and easily deformable structure in order to reach highly sensitive performance for micro force detection. As a result, this may be reasonable to consider bandwidth measurement and frequency response for achievement of high accuracy, and thus a dynamic modelling of such sensors become essentially necessary. In this paper, the 1-D and 2-D cantilever beam based micro-force sensors are designed and modelled on the basis of distributed parameter approach using Bernoulli-Euler equation. The resulting dynamic models can greatly enhance the measurement of micro force in microassembly. To verify the performance of the developed dynamic micro-force sensor, this dynamic sensor has been successfully used to guide a remote microassembly of the surface MEMS structures with microforce/visual feedback via Internet between USA and Hong Kong. © 2005 IEEE. |
Persistent Identifier | http://hdl.handle.net/10722/212913 |
DC Field | Value | Language |
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dc.contributor.author | Shen, Yantao | - |
dc.contributor.author | Xi, Ning | - |
dc.contributor.author | Li, Wen J. | - |
dc.date.accessioned | 2015-07-28T04:05:25Z | - |
dc.date.available | 2015-07-28T04:05:25Z | - |
dc.date.issued | 2005 | - |
dc.identifier.citation | 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO, 2005, v. 2005, p. 646-651 | - |
dc.identifier.uri | http://hdl.handle.net/10722/212913 | - |
dc.description.abstract | In-situ PVDF films bonded to the surface of flexible cantilever structure act as the effective micro-force sensors, they are mostly modelled using quasi-static relationship. However, such sensors are usually a significantly compliant and easily deformable structure in order to reach highly sensitive performance for micro force detection. As a result, this may be reasonable to consider bandwidth measurement and frequency response for achievement of high accuracy, and thus a dynamic modelling of such sensors become essentially necessary. In this paper, the 1-D and 2-D cantilever beam based micro-force sensors are designed and modelled on the basis of distributed parameter approach using Bernoulli-Euler equation. The resulting dynamic models can greatly enhance the measurement of micro force in microassembly. To verify the performance of the developed dynamic micro-force sensor, this dynamic sensor has been successfully used to guide a remote microassembly of the surface MEMS structures with microforce/visual feedback via Internet between USA and Hong Kong. © 2005 IEEE. | - |
dc.language | eng | - |
dc.relation.ispartof | 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO | - |
dc.title | Dynamic force measurement for microassembly of surface MEMS structures | - |
dc.type | Conference_Paper | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.scopus | eid_2-s2.0-33947694276 | - |
dc.identifier.volume | 2005 | - |
dc.identifier.spage | 646 | - |
dc.identifier.epage | 651 | - |