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- Publisher Website: 10.1109/NEMS.2007.352023
- Scopus: eid_2-s2.0-34548140622
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Conference Paper: Development of AFM based on nano positioning stage
| Title | Development of AFM based on nano positioning stage |
|---|---|
| Authors | |
| Keywords | Kinematic coupling AFM force curve AFM Nano positioning stage |
| Issue Date | 2007 |
| Citation | Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, 2007, p. 21-25 How to Cite? |
| Abstract | A single PZT (piezoelectric) tube is generally used in atomic force microscope (AFM) as its scanner. But due to the kinematic coupling of the single tube during its bending motion, there usually exist two kinds of structure errors: vertical cross coupling error and scanning size error which affect the precision of nano observation and manipulation. In this paper, a new AFM with nano positioning stage as its scanner is developed. The stage has three PZT actuators and can move in three directions with high precision without kinematic coupling, thus the two structure errors are eliminated effectively in the new AFM. Some development results are presented and the experimental results validate the performance of the AFM. © 2007 IEEE. |
| Persistent Identifier | http://hdl.handle.net/10722/212939 |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jiao, Niandong | - |
| dc.contributor.author | Wang, Yuechao | - |
| dc.contributor.author | Xi, Ning | - |
| dc.contributor.author | Dong, Zaili | - |
| dc.date.accessioned | 2015-07-28T04:05:31Z | - |
| dc.date.available | 2015-07-28T04:05:31Z | - |
| dc.date.issued | 2007 | - |
| dc.identifier.citation | Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, 2007, p. 21-25 | - |
| dc.identifier.uri | http://hdl.handle.net/10722/212939 | - |
| dc.description.abstract | A single PZT (piezoelectric) tube is generally used in atomic force microscope (AFM) as its scanner. But due to the kinematic coupling of the single tube during its bending motion, there usually exist two kinds of structure errors: vertical cross coupling error and scanning size error which affect the precision of nano observation and manipulation. In this paper, a new AFM with nano positioning stage as its scanner is developed. The stage has three PZT actuators and can move in three directions with high precision without kinematic coupling, thus the two structure errors are eliminated effectively in the new AFM. Some development results are presented and the experimental results validate the performance of the AFM. © 2007 IEEE. | - |
| dc.language | eng | - |
| dc.relation.ispartof | Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 | - |
| dc.subject | Kinematic coupling | - |
| dc.subject | AFM force curve | - |
| dc.subject | AFM | - |
| dc.subject | Nano positioning stage | - |
| dc.title | Development of AFM based on nano positioning stage | - |
| dc.type | Conference_Paper | - |
| dc.description.nature | link_to_subscribed_fulltext | - |
| dc.identifier.doi | 10.1109/NEMS.2007.352023 | - |
| dc.identifier.scopus | eid_2-s2.0-34548140622 | - |
| dc.identifier.spage | 21 | - |
| dc.identifier.epage | 25 | - |