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Article: Study on modeling and real-time display of AFM based robotic nano-imprint
| Title | Study on modeling and real-time display of AFM based robotic nano-imprint |
|---|---|
| Authors | |
| Keywords | Nano-scotch size model Atomic force microscope Robotic nano-patterning Real-time display |
| Issue Date | 2007 |
| Citation | Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2007, v. 28, n. SUPPL. 3, p. 37-40 How to Cite? |
| Abstract | Nano-imprint based on AFM probe may be used in fabrication or repair of MEMS mask pattern. In this research, we propose a nano-scotch size model of plastic material, based on which the scotch's position and size can be obtained according to probe's position and applied force, and then displayed on the visual interface according to virtual-reality (VR) technology. Based on real-time display of nano-imprint process, the operator can elementarily control the imprint process and eventual result, and nano-imprint on polycarbonate verifies the effectiveness of the proposed model. |
| Persistent Identifier | http://hdl.handle.net/10722/212956 |
| ISSN | 2023 SCImago Journal Rankings: 0.281 |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Tian, Xiaojun | - |
| dc.contributor.author | Wang, Yuechao | - |
| dc.contributor.author | Xi, Ning | - |
| dc.contributor.author | Dong, Zaili | - |
| dc.date.accessioned | 2015-07-28T04:05:34Z | - |
| dc.date.available | 2015-07-28T04:05:34Z | - |
| dc.date.issued | 2007 | - |
| dc.identifier.citation | Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2007, v. 28, n. SUPPL. 3, p. 37-40 | - |
| dc.identifier.issn | 0254-3087 | - |
| dc.identifier.uri | http://hdl.handle.net/10722/212956 | - |
| dc.description.abstract | Nano-imprint based on AFM probe may be used in fabrication or repair of MEMS mask pattern. In this research, we propose a nano-scotch size model of plastic material, based on which the scotch's position and size can be obtained according to probe's position and applied force, and then displayed on the visual interface according to virtual-reality (VR) technology. Based on real-time display of nano-imprint process, the operator can elementarily control the imprint process and eventual result, and nano-imprint on polycarbonate verifies the effectiveness of the proposed model. | - |
| dc.language | eng | - |
| dc.relation.ispartof | Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | - |
| dc.subject | Nano-scotch size model | - |
| dc.subject | Atomic force microscope | - |
| dc.subject | Robotic nano-patterning | - |
| dc.subject | Real-time display | - |
| dc.title | Study on modeling and real-time display of AFM based robotic nano-imprint | - |
| dc.type | Article | - |
| dc.description.nature | link_to_subscribed_fulltext | - |
| dc.identifier.scopus | eid_2-s2.0-39749161439 | - |
| dc.identifier.volume | 28 | - |
| dc.identifier.issue | SUPPL. 3 | - |
| dc.identifier.spage | 37 | - |
| dc.identifier.epage | 40 | - |
| dc.identifier.issnl | 0254-3087 | - |