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- Publisher Website: 10.1109/NMDC.2006.4388707
- Scopus: eid_2-s2.0-50249148918
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Conference Paper: Rapid fabrication of functional CNT sensor arrays using micro-spotting and DEP technologies
Title | Rapid fabrication of functional CNT sensor arrays using micro-spotting and DEP technologies |
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Authors | |
Issue Date | 2006 |
Citation | 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC, 2006, v. 1, p. 108-109 How to Cite? |
Abstract | Our team has developed a systematic process to rapidly construct Carbon Nanotube (CNT) sensors by combining DEP and micro-robotics technologies. Arrays of CNT sensors were fabricated on MUMPs chips using this systematic process and the CNT sensor characteristics were found to be very consistent with individual CNT sensors fabricated using basic manual DEP manipulation process. We have shown that the average time to fabricate CNT sensor using this process is ∼1 sec, which means that potentially 100,000 CNT components could be built in 24 hours. CNT Sensors, DEP Manipulation, Micro-robotics, Nano-sensor Arrays. |
Persistent Identifier | http://hdl.handle.net/10722/212997 |
DC Field | Value | Language |
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dc.contributor.author | Li, Wen J. | - |
dc.contributor.author | Xi, Ning | - |
dc.date.accessioned | 2015-07-28T04:05:42Z | - |
dc.date.available | 2015-07-28T04:05:42Z | - |
dc.date.issued | 2006 | - |
dc.identifier.citation | 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC, 2006, v. 1, p. 108-109 | - |
dc.identifier.uri | http://hdl.handle.net/10722/212997 | - |
dc.description.abstract | Our team has developed a systematic process to rapidly construct Carbon Nanotube (CNT) sensors by combining DEP and micro-robotics technologies. Arrays of CNT sensors were fabricated on MUMPs chips using this systematic process and the CNT sensor characteristics were found to be very consistent with individual CNT sensors fabricated using basic manual DEP manipulation process. We have shown that the average time to fabricate CNT sensor using this process is ∼1 sec, which means that potentially 100,000 CNT components could be built in 24 hours. CNT Sensors, DEP Manipulation, Micro-robotics, Nano-sensor Arrays. | - |
dc.language | eng | - |
dc.relation.ispartof | 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC | - |
dc.title | Rapid fabrication of functional CNT sensor arrays using micro-spotting and DEP technologies | - |
dc.type | Conference_Paper | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1109/NMDC.2006.4388707 | - |
dc.identifier.scopus | eid_2-s2.0-50249148918 | - |
dc.identifier.volume | 1 | - |
dc.identifier.spage | 108 | - |
dc.identifier.epage | 109 | - |