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Article: Nanostructure transfer using cyclic olefin copolymer templates fabricated by thermal nanoimprint lithography
Title | Nanostructure transfer using cyclic olefin copolymer templates fabricated by thermal nanoimprint lithography |
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Authors | |
Issue Date | 2014 |
Publisher | American Vacuum Society. The Journal's web site is located at http://avspublications.org/jvstb/ |
Citation | Journal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics, 2014, v. 32 n. 6, article no. 06FI02 How to Cite? |
Abstract | The authors demonstrate the application of cyclic olefin copolymer (COC) films as secondary nanoimprint templates for transferring sub-100 nm nanostructures. Featureless COC films were first patterned by a thermal nanoimprint process using silicon molds with gratings of various periods from 140 to 420 nm. Morphology of COC gratings imprinted at different processing parameters was characterized by scanning electron microscopy and atomic force microscopy and the grating transfer fidelity was systematically investigated. The nanoimprinted COC substrates were then used as secondary templates in an ultraviolet (UV)-cured nanoimprint lithography process to transfer the grating patterns onto UV-curable epoxy. The authors also demonstrate the application of using these nanoimprinted COC templates to transfer metallic nanostructures onto fiber facets. With good mechanical strength, high transparency to UV light, easy fabrication, and excellent chemical compatibility, COC is a promising material that can be used in low-cost secondary templates for large-volume nanoimprint-based manufacturing of nanostructured devices. |
Persistent Identifier | http://hdl.handle.net/10722/214229 |
ISSN | 2023 Impact Factor: 1.5 2023 SCImago Journal Rankings: 0.328 |
ISI Accession Number ID |
DC Field | Value | Language |
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dc.contributor.author | Khan, A | - |
dc.contributor.author | Li, S | - |
dc.contributor.author | Tang, X | - |
dc.contributor.author | Li, W | - |
dc.date.accessioned | 2015-08-21T10:55:33Z | - |
dc.date.available | 2015-08-21T10:55:33Z | - |
dc.date.issued | 2014 | - |
dc.identifier.citation | Journal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics, 2014, v. 32 n. 6, article no. 06FI02 | - |
dc.identifier.issn | 2166-2746 | - |
dc.identifier.uri | http://hdl.handle.net/10722/214229 | - |
dc.description.abstract | The authors demonstrate the application of cyclic olefin copolymer (COC) films as secondary nanoimprint templates for transferring sub-100 nm nanostructures. Featureless COC films were first patterned by a thermal nanoimprint process using silicon molds with gratings of various periods from 140 to 420 nm. Morphology of COC gratings imprinted at different processing parameters was characterized by scanning electron microscopy and atomic force microscopy and the grating transfer fidelity was systematically investigated. The nanoimprinted COC substrates were then used as secondary templates in an ultraviolet (UV)-cured nanoimprint lithography process to transfer the grating patterns onto UV-curable epoxy. The authors also demonstrate the application of using these nanoimprinted COC templates to transfer metallic nanostructures onto fiber facets. With good mechanical strength, high transparency to UV light, easy fabrication, and excellent chemical compatibility, COC is a promising material that can be used in low-cost secondary templates for large-volume nanoimprint-based manufacturing of nanostructured devices. | - |
dc.language | eng | - |
dc.publisher | American Vacuum Society. The Journal's web site is located at http://avspublications.org/jvstb/ | - |
dc.relation.ispartof | Journal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics | - |
dc.rights | Copyright 2014 American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society. The following article appeared in Journal of Vacuum Science and Technology B, 2014, v. 32 n. 6, article no. 06FI02 and may be found at https://doi.org/10.1116/1.4900609. | - |
dc.title | Nanostructure transfer using cyclic olefin copolymer templates fabricated by thermal nanoimprint lithography | - |
dc.type | Article | - |
dc.identifier.email | Li, W: liwd@hku.hk | - |
dc.identifier.authority | Li, W=rp01581 | - |
dc.description.nature | published_or_final_version | - |
dc.identifier.doi | 10.1116/1.4900609 | - |
dc.identifier.scopus | eid_2-s2.0-84949130005 | - |
dc.identifier.hkuros | 249575 | - |
dc.identifier.volume | 32 | - |
dc.identifier.issue | 6 | - |
dc.identifier.spage | article no. 06FI02 | - |
dc.identifier.epage | article no. 06FI02 | - |
dc.identifier.isi | WOS:000345512800048 | - |
dc.publisher.place | United States | - |
dc.identifier.issnl | 2166-2746 | - |