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- Publisher Website: 10.1179/1743284714Y.0000000646
- Scopus: eid_2-s2.0-84921728823
- WOS: WOS:000348343000009
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Article: Effects of SiNx Interlayer on Characterisation of Amorphous Diamond-Like Carbon Films
Title | Effects of SiNx Interlayer on Characterisation of Amorphous Diamond-Like Carbon Films |
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Authors | |
Keywords | Diamond like carbon films Magnetron sputtering Raman spectra Scanning electron microscopy SiNx interlayer |
Issue Date | 2015 |
Citation | Materials Science and Technology, 2015, v. 31, p. 703-708 How to Cite? |
Persistent Identifier | http://hdl.handle.net/10722/215251 |
ISSN | 2023 Impact Factor: 1.7 2023 SCImago Journal Rankings: 0.421 |
ISI Accession Number ID |
DC Field | Value | Language |
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dc.contributor.author | Chen, Q | - |
dc.contributor.author | Shih, K | - |
dc.contributor.author | Shen, YH | - |
dc.contributor.author | Luo, Y | - |
dc.contributor.author | Li, R | - |
dc.date.accessioned | 2015-08-21T13:19:11Z | - |
dc.date.available | 2015-08-21T13:19:11Z | - |
dc.date.issued | 2015 | - |
dc.identifier.citation | Materials Science and Technology, 2015, v. 31, p. 703-708 | - |
dc.identifier.issn | 0267-0836 | - |
dc.identifier.uri | http://hdl.handle.net/10722/215251 | - |
dc.language | eng | - |
dc.relation.ispartof | Materials Science and Technology | - |
dc.subject | Diamond like carbon films | - |
dc.subject | Magnetron sputtering | - |
dc.subject | Raman spectra | - |
dc.subject | Scanning electron microscopy | - |
dc.subject | SiNx interlayer | - |
dc.title | Effects of SiNx Interlayer on Characterisation of Amorphous Diamond-Like Carbon Films | - |
dc.type | Article | - |
dc.identifier.email | Shih, K: kshih@hku.hk | - |
dc.identifier.authority | Shih, K=rp00167 | - |
dc.identifier.doi | 10.1179/1743284714Y.0000000646 | - |
dc.identifier.scopus | eid_2-s2.0-84921728823 | - |
dc.identifier.hkuros | 250085 | - |
dc.identifier.volume | 31 | - |
dc.identifier.spage | 703 | - |
dc.identifier.epage | 708 | - |
dc.identifier.eissn | 1743-2847 | - |
dc.identifier.isi | WOS:000348343000009 | - |
dc.identifier.issnl | 0267-0836 | - |