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Article: Induction-heated nanoimprint on soda-lime glass using sapphire molds

TitleInduction-heated nanoimprint on soda-lime glass using sapphire molds
Authors
CAI, JLI, SGuo, XGe, HLi, W
Issue Date2016
PublisherAmerican Vacuum Society. The Journal's web site is located at http://avspublications.org/jvstb/
Citation
Journal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics, 2016, v. 34 n. 6, article no. 06K408, p. 1-7 How to Cite?
DOI: http://dx.doi.org/10.1116/1.4966557
Persistent Identifierhttp://hdl.handle.net/10722/245060
ISSN
2166-2746
2023 Impact Factor: 1.5
2023 SCImago Journal Rankings: 0.328
ISI Accession Number ID
WOS:000389530000010

 

DC FieldValueLanguage
dc.contributor.authorCAI, J-
dc.contributor.authorLI, S-
dc.contributor.authorGuo, X-
dc.contributor.authorGe, H-
dc.contributor.authorLi, W-
dc.date.accessioned2017-09-18T02:03:55Z-
dc.date.available2017-09-18T02:03:55Z-
dc.date.issued2016-
dc.identifier.citationJournal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics, 2016, v. 34 n. 6, article no. 06K408, p. 1-7-
dc.identifier.issn2166-2746-
dc.identifier.urihttp://hdl.handle.net/10722/245060-
dc.languageeng-
dc.publisherAmerican Vacuum Society. The Journal's web site is located at http://avspublications.org/jvstb/-
dc.relation.ispartofJournal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics-
dc.rightsCopyright 2016 American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society. The following article appeared in Journal of Vacuum Science and Technology: Part B Nanotechnology & Microelectronics, 2016, v. 34 n. 6, article no. 06K408, p. 1-7 and may be found at https://doi.org/10.1116/1.4966557-
dc.titleInduction-heated nanoimprint on soda-lime glass using sapphire molds-
dc.typeArticle-
dc.identifier.emailLi, W: liwd@hku.hk-
dc.identifier.authorityLi, W=rp01581-
dc.description.naturepublished_or_final_version-
dc.identifier.doi10.1116/1.4966557-
dc.identifier.scopuseid_2-s2.0-84994259559-
dc.identifier.hkuros276662-
dc.identifier.hkuros302094-
dc.identifier.volume34-
dc.identifier.issue6-
dc.identifier.spagearticle no. 06K408, p. 1-
dc.identifier.epagearticle no. 06K408, p. 7-
dc.identifier.isiWOS:000389530000010-
dc.publisher.placeUnited States-
dc.identifier.issnl2166-2746-

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