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- Publisher Website: 10.1016/j.sna.2005.12.041
- Scopus: eid_2-s2.0-33645136572
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Article: Stiction problems in releasing of 3D microstructures and its solution
Title | Stiction problems in releasing of 3D microstructures and its solution |
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Authors | |
Keywords | Micro-stereolithography MEMS Photopolymerization Surface tension |
Issue Date | 2006 |
Citation | Sensors and Actuators, A: Physical, 2006, v. 128, n. 1, p. 109-115 How to Cite? |
Abstract | Micro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion. © 2006 Elsevier B.V. All rights reserved. |
Persistent Identifier | http://hdl.handle.net/10722/256919 |
ISSN | 2023 Impact Factor: 4.1 2023 SCImago Journal Rankings: 0.788 |
ISI Accession Number ID |
DC Field | Value | Language |
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dc.contributor.author | Wu, Dongmin | - |
dc.contributor.author | Fang, Nicholas | - |
dc.contributor.author | Sun, Cheng | - |
dc.contributor.author | Zhang, Xiang | - |
dc.date.accessioned | 2018-07-24T08:58:20Z | - |
dc.date.available | 2018-07-24T08:58:20Z | - |
dc.date.issued | 2006 | - |
dc.identifier.citation | Sensors and Actuators, A: Physical, 2006, v. 128, n. 1, p. 109-115 | - |
dc.identifier.issn | 0924-4247 | - |
dc.identifier.uri | http://hdl.handle.net/10722/256919 | - |
dc.description.abstract | Micro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion. © 2006 Elsevier B.V. All rights reserved. | - |
dc.language | eng | - |
dc.relation.ispartof | Sensors and Actuators, A: Physical | - |
dc.subject | Micro-stereolithography | - |
dc.subject | MEMS | - |
dc.subject | Photopolymerization | - |
dc.subject | Surface tension | - |
dc.title | Stiction problems in releasing of 3D microstructures and its solution | - |
dc.type | Article | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1016/j.sna.2005.12.041 | - |
dc.identifier.scopus | eid_2-s2.0-33645136572 | - |
dc.identifier.volume | 128 | - |
dc.identifier.issue | 1 | - |
dc.identifier.spage | 109 | - |
dc.identifier.epage | 115 | - |
dc.identifier.isi | WOS:000236649200017 | - |
dc.identifier.issnl | 0924-4247 | - |