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Article: Stiction problems in releasing of 3D microstructures and its solution

TitleStiction problems in releasing of 3D microstructures and its solution
Authors
KeywordsMicro-stereolithography
MEMS
Photopolymerization
Surface tension
Issue Date2006
Citation
Sensors and Actuators, A: Physical, 2006, v. 128, n. 1, p. 109-115 How to Cite?
AbstractMicro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion. © 2006 Elsevier B.V. All rights reserved.
Persistent Identifierhttp://hdl.handle.net/10722/256919
ISSN
2020 Impact Factor: 3.407
2015 SCImago Journal Rankings: 0.902
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorWu, Dongmin-
dc.contributor.authorFang, Nicholas-
dc.contributor.authorSun, Cheng-
dc.contributor.authorZhang, Xiang-
dc.date.accessioned2018-07-24T08:58:20Z-
dc.date.available2018-07-24T08:58:20Z-
dc.date.issued2006-
dc.identifier.citationSensors and Actuators, A: Physical, 2006, v. 128, n. 1, p. 109-115-
dc.identifier.issn0924-4247-
dc.identifier.urihttp://hdl.handle.net/10722/256919-
dc.description.abstractMicro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion. © 2006 Elsevier B.V. All rights reserved.-
dc.languageeng-
dc.relation.ispartofSensors and Actuators, A: Physical-
dc.subjectMicro-stereolithography-
dc.subjectMEMS-
dc.subjectPhotopolymerization-
dc.subjectSurface tension-
dc.titleStiction problems in releasing of 3D microstructures and its solution-
dc.typeArticle-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1016/j.sna.2005.12.041-
dc.identifier.scopuseid_2-s2.0-33645136572-
dc.identifier.volume128-
dc.identifier.issue1-
dc.identifier.spage109-
dc.identifier.epage115-
dc.identifier.isiWOS:000236649200017-
dc.identifier.issnl0924-4247-

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