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Article: 3D Volumetric Energy Deposition of Focused Helium Ion Beam Lithography: Visualization, Modeling, and Applications in Nanofabrication

Title3D Volumetric Energy Deposition of Focused Helium Ion Beam Lithography: Visualization, Modeling, and Applications in Nanofabrication
Authors
Cai, JZhu, ZAlkemade, PFvan Veldhoven, EWang, QGe, HRodrigues, SPCai, WLi, W
Keywords3D nanofabrication
focused helium ion beam lithography
hydrogen silsesquioxane
localized volumetric energy deposition
Issue Date2018
PublisherWiley-VCH Verlag GmbH & Co. KGaA. The Journal's web site is located at http://www.ami-journal.com/
Citation
Advanced Materials Interfaces, 2018, v. 5 n. 12, p. 1800203 How to Cite?
DOI: http://dx.doi.org/10.1002/admi.201800203
Persistent Identifierhttp://hdl.handle.net/10722/260502
ISSN
2196-7350
2023 Impact Factor: 4.3
2023 SCImago Journal Rankings: 1.194
ISI Accession Number ID
WOS:000436103900017

 

DC FieldValueLanguage
dc.contributor.authorCai, J-
dc.contributor.authorZhu, Z-
dc.contributor.authorAlkemade, PF-
dc.contributor.authorvan Veldhoven, E-
dc.contributor.authorWang, Q-
dc.contributor.authorGe, H-
dc.contributor.authorRodrigues, SP-
dc.contributor.authorCai, W-
dc.contributor.authorLi, W-
dc.date.accessioned2018-09-14T08:42:46Z-
dc.date.available2018-09-14T08:42:46Z-
dc.date.issued2018-
dc.identifier.citationAdvanced Materials Interfaces, 2018, v. 5 n. 12, p. 1800203-
dc.identifier.issn2196-7350-
dc.identifier.urihttp://hdl.handle.net/10722/260502-
dc.languageeng-
dc.publisherWiley-VCH Verlag GmbH & Co. KGaA. The Journal's web site is located at http://www.ami-journal.com/-
dc.relation.ispartofAdvanced Materials Interfaces-
dc.rightsPreprint This is the pre-peer reviewed version of the following article: [FULL CITE], which has been published in final form at [Link to final article]. Authors are not required to remove preprints posted prior to acceptance of the submitted version. Postprint This is the peer reviewed version of the following article: [FULL CITE], which has been published in final form at [Link to final article using the DOI]. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Self-Archiving: http://olabout.wiley.com/WileyCDA/Section/id-828039.html#terms-
dc.subject3D nanofabrication-
dc.subjectfocused helium ion beam lithography-
dc.subjecthydrogen silsesquioxane-
dc.subjectlocalized volumetric energy deposition-
dc.title3D Volumetric Energy Deposition of Focused Helium Ion Beam Lithography: Visualization, Modeling, and Applications in Nanofabrication-
dc.typeArticle-
dc.identifier.emailCai, J: caijingx@hku.hk-
dc.identifier.emailLi, W: liwd@hku.hk-
dc.identifier.authorityLi, W=rp01581-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1002/admi.201800203-
dc.identifier.scopuseid_2-s2.0-85048990810-
dc.identifier.hkuros291177-
dc.identifier.volume5-
dc.identifier.issue12-
dc.identifier.spage1800203-
dc.identifier.epage1800203-
dc.identifier.isiWOS:000436103900017-
dc.publisher.placeGermany-
dc.identifier.issnl2196-7350-

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