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Article: Design investigation on micro thermal sensor film resistor
| Title | Design investigation on micro thermal sensor film resistor |
|---|---|
| Authors | |
| Keywords | Thermal device Micro sensor Film resistor TCR |
| Issue Date | 2005 |
| Citation | Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2005, v. 16, n. SUPPL., p. 202-204 How to Cite? |
| Abstract | Through analyzing the operating principles of the micro thermal sensor, associating with thin film resistor and the substrate, we got TCR of the resistor, and analyzed the method of calculation and measurement of the TCR and the resistively of MEMS thermal sensor. Then, we investigated the effectiveness of the resistor special dimension on the sensor performance. At last, we presented the design basis of the micro thermal sensor film material, the substrate, the dimension and the TCR of the thin film resistor, so we can offer references to thermal sensor's thin film resistor design and performance analysis. |
| Persistent Identifier | http://hdl.handle.net/10722/265763 |
| ISSN | 2023 SCImago Journal Rankings: 0.289 |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Liu, Kui | - |
| dc.contributor.author | Yuan, Weizheng | - |
| dc.contributor.author | Deng, Jinjun | - |
| dc.contributor.author | Ma, Binghe | - |
| dc.contributor.author | Jiang, Chengyu | - |
| dc.date.accessioned | 2018-12-03T01:21:37Z | - |
| dc.date.available | 2018-12-03T01:21:37Z | - |
| dc.date.issued | 2005 | - |
| dc.identifier.citation | Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2005, v. 16, n. SUPPL., p. 202-204 | - |
| dc.identifier.issn | 1004-132X | - |
| dc.identifier.uri | http://hdl.handle.net/10722/265763 | - |
| dc.description.abstract | Through analyzing the operating principles of the micro thermal sensor, associating with thin film resistor and the substrate, we got TCR of the resistor, and analyzed the method of calculation and measurement of the TCR and the resistively of MEMS thermal sensor. Then, we investigated the effectiveness of the resistor special dimension on the sensor performance. At last, we presented the design basis of the micro thermal sensor film material, the substrate, the dimension and the TCR of the thin film resistor, so we can offer references to thermal sensor's thin film resistor design and performance analysis. | - |
| dc.language | eng | - |
| dc.relation.ispartof | Zhongguo Jixie Gongcheng/China Mechanical Engineering | - |
| dc.subject | Thermal device | - |
| dc.subject | Micro sensor | - |
| dc.subject | Film resistor | - |
| dc.subject | TCR | - |
| dc.title | Design investigation on micro thermal sensor film resistor | - |
| dc.type | Article | - |
| dc.description.nature | link_to_subscribed_fulltext | - |
| dc.identifier.scopus | eid_2-s2.0-23744505799 | - |
| dc.identifier.volume | 16 | - |
| dc.identifier.issue | SUPPL. | - |
| dc.identifier.spage | 202 | - |
| dc.identifier.epage | 204 | - |
| dc.identifier.issnl | 1004-132X | - |