Fabrication of 1D and 2D vertical nanomagnetic resonators

Abstract

We have successfully fabricated the first resonant magnetic nanostructures exhibiting a negative permeability in the midinfrared. These metal-dielectric structures exhibit local resonances based on metallic inductive-capacitive effects that are controlled by the dimensions of the individual nanostructures and are independent of the periodicity, which is much smaller than the resonance wavelengths. Compared to other commonly used structures for obtaining negative permeability in the microwave and THz regions which are based on a planar fabrication paradigm, this structure is oriented vertically so that the smallest features are controlled by deposition rather than by lithography. © 2004 American Vacuum Society.