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- Publisher Website: 10.1049/el:20083091
- Scopus: eid_2-s2.0-39349088722
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Article: Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures
Title | Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures |
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Authors | |
Issue Date | 2008 |
Citation | Electronics Letters, 2008, v. 44, n. 4, p. 283-285 How to Cite? |
Abstract | A novel single crystalline silicon diamond-shaped atomic force microscope (AFM) cantilever for accurate mechanical tests of MEMS structures is presented. A strip bending test of micromachined gold thin film strip specimens has been performed using the proposed AFM cantilever. The experimental results show that a more accurate and uniform bending test is possible with this new cantilever by suppressing lateral motions of a conventional beam-shaped cantilever. © The Institution of Engineering and Technology 2008. |
Persistent Identifier | http://hdl.handle.net/10722/309185 |
ISSN | 2023 Impact Factor: 0.7 2023 SCImago Journal Rankings: 0.323 |
ISI Accession Number ID |
DC Field | Value | Language |
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dc.contributor.author | Kim, J. M. | - |
dc.contributor.author | Hyeon, I. J. | - |
dc.contributor.author | Cho, K. | - |
dc.contributor.author | Lee, H. J. | - |
dc.contributor.author | Kim, Y. K. | - |
dc.contributor.author | Chung, T. K. | - |
dc.contributor.author | Kim, H. S. | - |
dc.contributor.author | Baek, C. W. | - |
dc.date.accessioned | 2021-12-15T03:59:42Z | - |
dc.date.available | 2021-12-15T03:59:42Z | - |
dc.date.issued | 2008 | - |
dc.identifier.citation | Electronics Letters, 2008, v. 44, n. 4, p. 283-285 | - |
dc.identifier.issn | 0013-5194 | - |
dc.identifier.uri | http://hdl.handle.net/10722/309185 | - |
dc.description.abstract | A novel single crystalline silicon diamond-shaped atomic force microscope (AFM) cantilever for accurate mechanical tests of MEMS structures is presented. A strip bending test of micromachined gold thin film strip specimens has been performed using the proposed AFM cantilever. The experimental results show that a more accurate and uniform bending test is possible with this new cantilever by suppressing lateral motions of a conventional beam-shaped cantilever. © The Institution of Engineering and Technology 2008. | - |
dc.language | eng | - |
dc.relation.ispartof | Electronics Letters | - |
dc.title | Silicon micromachined diamond-shaped AFM cantilever for accurate mechanical tests of MEMS structures | - |
dc.type | Article | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1049/el:20083091 | - |
dc.identifier.scopus | eid_2-s2.0-39349088722 | - |
dc.identifier.volume | 44 | - |
dc.identifier.issue | 4 | - |
dc.identifier.spage | 283 | - |
dc.identifier.epage | 285 | - |
dc.identifier.isi | WOS:000253766600019 | - |