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Article: Surface morphology and structural observation of laser interference crystallized a-Si:H/a-SiNx:H multilayers

TitleSurface morphology and structural observation of laser interference crystallized a-Si:H/a-SiN<inf>x</inf>:H multilayers
Authors
Issue Date2000
Citation
Applied Surface Science, 2000, v. 165, n. 2, p. 85-90 How to Cite?
AbstractCombined with atomic force microscope (AFM), micro-Raman spectroscope, cross-section transmission electron microscope (TEM) and high resolution electron microscope (HREM) analyses, the surface morphology and structures of a-Si:H/a-SiNx:H multilayers (MLs), irradiated by excimer laser through the phase shifting mask grating, are investigated. It is found that Si nanocrystallites (nc-Si) are formed within the initial a-Si:H sublayers, and the size of the grains can be controlled due to the constrained crystallization effect. And it is possible to use this laser interference crystallization (LIC) method to get the periodic distribution of nc-Si in both transverse and longitudinal direction.
Persistent Identifierhttp://hdl.handle.net/10722/310370
ISSN
2023 Impact Factor: 6.3
2023 SCImago Journal Rankings: 1.210
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorWang, Li-
dc.contributor.authorLi, Jian-
dc.contributor.authorHuang, Xinfan-
dc.contributor.authorLi, Qiliang-
dc.contributor.authorYin, Xiaobo-
dc.contributor.authorFan, Wenbin-
dc.contributor.authorXu, Jun-
dc.contributor.authorLi, Wei-
dc.contributor.authorLi, Zhifeng-
dc.contributor.authorZhu, Jianming-
dc.contributor.authorWang, Mu-
dc.contributor.authorLiu, Zhiguo-
dc.contributor.authorChen, Kunji-
dc.date.accessioned2022-01-31T06:04:42Z-
dc.date.available2022-01-31T06:04:42Z-
dc.date.issued2000-
dc.identifier.citationApplied Surface Science, 2000, v. 165, n. 2, p. 85-90-
dc.identifier.issn0169-4332-
dc.identifier.urihttp://hdl.handle.net/10722/310370-
dc.description.abstractCombined with atomic force microscope (AFM), micro-Raman spectroscope, cross-section transmission electron microscope (TEM) and high resolution electron microscope (HREM) analyses, the surface morphology and structures of a-Si:H/a-SiNx:H multilayers (MLs), irradiated by excimer laser through the phase shifting mask grating, are investigated. It is found that Si nanocrystallites (nc-Si) are formed within the initial a-Si:H sublayers, and the size of the grains can be controlled due to the constrained crystallization effect. And it is possible to use this laser interference crystallization (LIC) method to get the periodic distribution of nc-Si in both transverse and longitudinal direction.-
dc.languageeng-
dc.relation.ispartofApplied Surface Science-
dc.titleSurface morphology and structural observation of laser interference crystallized a-Si:H/a-SiN<inf>x</inf>:H multilayers-
dc.typeArticle-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1016/S0169-4332(00)00308-1-
dc.identifier.scopuseid_2-s2.0-0034275168-
dc.identifier.volume165-
dc.identifier.issue2-
dc.identifier.spage85-
dc.identifier.epage90-
dc.identifier.isiWOS:000088757700001-

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