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- Publisher Website: 10.1109/NANO.2007.4601162
- Scopus: eid_2-s2.0-52949085143
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Conference Paper: Solid-state electrochemical stamping of functional metallic nanostructures
Title | Solid-state electrochemical stamping of functional metallic nanostructures |
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Authors | |
Keywords | Electrochemistry Nanoimprint lithography Nanophotonics Solid state ionics Surface enhanced raman spectroscopy |
Issue Date | 2007 |
Citation | 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings, 2007, p. 162-165 How to Cite? |
Abstract | A new approach of directly patterning metal at nano-scale with excellent dimensional resolution and flexibility is introduced for fabrication of functional nano-structures. This technique is based on the solid-state electrochemical dissolution of a metallic substrate at its contact with a pre-patterned surface of a solid electrolyte tool, and the subsequent formation of the complimentary pattern on the metal substrate as the solid electrolyte etches through the metal layer. Our results demonstrate repeatable and high-fidelity patterning of metal structures with a wide dimension range (20μm to 50nm). As this process is carried out in ambient environment and does not require wet chemicals, its potential for use as a simple and yet high-throughput metal patterning technique offers a highly competitive approach to fabricating functional structures and devices such as chemical sensors and photonic devices. © 2007 IEEE. |
Persistent Identifier | http://hdl.handle.net/10722/318451 |
DC Field | Value | Language |
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dc.contributor.author | Hsu, Keng | - |
dc.contributor.author | Schultz, Peter | - |
dc.contributor.author | Ferreira, Placid | - |
dc.contributor.author | Fang, Nicholas | - |
dc.date.accessioned | 2022-10-11T12:23:47Z | - |
dc.date.available | 2022-10-11T12:23:47Z | - |
dc.date.issued | 2007 | - |
dc.identifier.citation | 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings, 2007, p. 162-165 | - |
dc.identifier.uri | http://hdl.handle.net/10722/318451 | - |
dc.description.abstract | A new approach of directly patterning metal at nano-scale with excellent dimensional resolution and flexibility is introduced for fabrication of functional nano-structures. This technique is based on the solid-state electrochemical dissolution of a metallic substrate at its contact with a pre-patterned surface of a solid electrolyte tool, and the subsequent formation of the complimentary pattern on the metal substrate as the solid electrolyte etches through the metal layer. Our results demonstrate repeatable and high-fidelity patterning of metal structures with a wide dimension range (20μm to 50nm). As this process is carried out in ambient environment and does not require wet chemicals, its potential for use as a simple and yet high-throughput metal patterning technique offers a highly competitive approach to fabricating functional structures and devices such as chemical sensors and photonic devices. © 2007 IEEE. | - |
dc.language | eng | - |
dc.relation.ispartof | 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings | - |
dc.subject | Electrochemistry | - |
dc.subject | Nanoimprint lithography | - |
dc.subject | Nanophotonics | - |
dc.subject | Solid state ionics | - |
dc.subject | Surface enhanced raman spectroscopy | - |
dc.title | Solid-state electrochemical stamping of functional metallic nanostructures | - |
dc.type | Conference_Paper | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1109/NANO.2007.4601162 | - |
dc.identifier.scopus | eid_2-s2.0-52949085143 | - |
dc.identifier.spage | 162 | - |
dc.identifier.epage | 165 | - |