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Article: Polydimethylsiloxane-integratable micropressure sensor for microfluidic chips

TitlePolydimethylsiloxane-integratable micropressure sensor for microfluidic chips
Authors
Issue Date2009
Citation
Biomicrofluidics, 2009, v. 3, n. 3, article no. 006903BMF How to Cite?
AbstractA novel microfluidic pressure sensor which can be fully integrated into polydimethylsiloxane (PDMS) is reported. The sensor produces electrical signals directly. We integrated PDMS-based conductive composites into a 30 μm thick membrane and bonded it to the microchannel side wall. The response time of the sensor is approximately 100 ms and can work within a pressure range as wide as 0-100 kPa. The resolution of this micropressure sensor is generally 0.1 kPa but can be increased to 0.01 kPa at high pressures as a result of the quadratic relationship between resistance and pressure. The PDMS-based nature of the sensor ensures its perfect bonding with PDMS chips, and the standard photolithographic process of the sensor allows one-time fabrication of three dimensional structures or even microsensor arrays. The theoretical calculations are in good agreement with experimental observations. © 2009 American Institute of Physics.
Persistent Identifierhttp://hdl.handle.net/10722/318475
ISSN
2023 Impact Factor: 2.6
2023 SCImago Journal Rankings: 0.516
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorWang, Limu-
dc.contributor.authorZhang, Mengying-
dc.contributor.authorYang, Min-
dc.contributor.authorZhu, Weiming-
dc.contributor.authorWu, Jinbo-
dc.contributor.authorGong, Xiuqing-
dc.contributor.authorWen, Weijia-
dc.date.accessioned2022-10-11T12:23:50Z-
dc.date.available2022-10-11T12:23:50Z-
dc.date.issued2009-
dc.identifier.citationBiomicrofluidics, 2009, v. 3, n. 3, article no. 006903BMF-
dc.identifier.issn1932-1058-
dc.identifier.urihttp://hdl.handle.net/10722/318475-
dc.description.abstractA novel microfluidic pressure sensor which can be fully integrated into polydimethylsiloxane (PDMS) is reported. The sensor produces electrical signals directly. We integrated PDMS-based conductive composites into a 30 μm thick membrane and bonded it to the microchannel side wall. The response time of the sensor is approximately 100 ms and can work within a pressure range as wide as 0-100 kPa. The resolution of this micropressure sensor is generally 0.1 kPa but can be increased to 0.01 kPa at high pressures as a result of the quadratic relationship between resistance and pressure. The PDMS-based nature of the sensor ensures its perfect bonding with PDMS chips, and the standard photolithographic process of the sensor allows one-time fabrication of three dimensional structures or even microsensor arrays. The theoretical calculations are in good agreement with experimental observations. © 2009 American Institute of Physics.-
dc.languageeng-
dc.relation.ispartofBiomicrofluidics-
dc.titlePolydimethylsiloxane-integratable micropressure sensor for microfluidic chips-
dc.typeArticle-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1063/1.3230500-
dc.identifier.scopuseid_2-s2.0-77950988333-
dc.identifier.volume3-
dc.identifier.issue3-
dc.identifier.spagearticle no. 006903BMF-
dc.identifier.epagearticle no. 006903BMF-
dc.identifier.isiWOS:000270379600006-

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