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- Publisher Website: 10.1364/cleo.2010.cthv6
- Scopus: eid_2-s2.0-85086614083
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Conference Paper: Non-lithographic patterning and metal-assisted chemical etching for manufacturing of tunable light-emitting silicon nanowire arrays
| Title | Non-lithographic patterning and metal-assisted chemical etching for manufacturing of tunable light-emitting silicon nanowire arrays |
|---|---|
| Authors | |
| Issue Date | 2010 |
| Citation | Optics InfoBase Conference Papers, 2010 How to Cite? |
| Abstract | We report a top-down fabrication method that involves the combination of superionic-solid-state-stamping (S4) patterning with metal-assisted-chemical-etching (MacEtch), to produce silicon nanowire arrays with defined geometry and optical properties in a manufacturable fashion. © 2010 Optical Society of America. |
| Persistent Identifier | http://hdl.handle.net/10722/318837 |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chern, W. | - |
| dc.contributor.author | Hsu, K. | - |
| dc.contributor.author | Chun, I. | - |
| dc.contributor.author | Azeredo, B. | - |
| dc.contributor.author | Fang, N. | - |
| dc.contributor.author | Ferreira, P. | - |
| dc.contributor.author | Li, X. | - |
| dc.date.accessioned | 2022-10-11T12:24:40Z | - |
| dc.date.available | 2022-10-11T12:24:40Z | - |
| dc.date.issued | 2010 | - |
| dc.identifier.citation | Optics InfoBase Conference Papers, 2010 | - |
| dc.identifier.uri | http://hdl.handle.net/10722/318837 | - |
| dc.description.abstract | We report a top-down fabrication method that involves the combination of superionic-solid-state-stamping (S4) patterning with metal-assisted-chemical-etching (MacEtch), to produce silicon nanowire arrays with defined geometry and optical properties in a manufacturable fashion. © 2010 Optical Society of America. | - |
| dc.language | eng | - |
| dc.relation.ispartof | Optics InfoBase Conference Papers | - |
| dc.title | Non-lithographic patterning and metal-assisted chemical etching for manufacturing of tunable light-emitting silicon nanowire arrays | - |
| dc.type | Conference_Paper | - |
| dc.description.nature | link_to_subscribed_fulltext | - |
| dc.identifier.doi | 10.1364/cleo.2010.cthv6 | - |
| dc.identifier.scopus | eid_2-s2.0-85086614083 | - |
| dc.identifier.eissn | 2162-2701 | - |