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Conference Paper: Material Deposition with Spatial Thickness Variation for Reflective Color Filter
Title | Material Deposition with Spatial Thickness Variation for Reflective Color Filter |
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Authors | |
Issue Date | 2020 |
Citation | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, 2020, v. 2020-May, article no. 9192737 How to Cite? |
Abstract | A new material deposition method to pattern 2D structures with spatial thickness variation using single fixed shadow mask is demonstrated. The method is applied to fabricate multispectral reflective color filter arrays of high customizability. |
Persistent Identifier | http://hdl.handle.net/10722/318869 |
ISSN | 2023 SCImago Journal Rankings: 0.121 |
ISI Accession Number ID |
DC Field | Value | Language |
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dc.contributor.author | Li, Xinhao | - |
dc.contributor.author | Tan, Zheng Jie | - |
dc.contributor.author | Fang, Nicholas X. | - |
dc.date.accessioned | 2022-10-11T12:24:44Z | - |
dc.date.available | 2022-10-11T12:24:44Z | - |
dc.date.issued | 2020 | - |
dc.identifier.citation | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, 2020, v. 2020-May, article no. 9192737 | - |
dc.identifier.issn | 1092-8081 | - |
dc.identifier.uri | http://hdl.handle.net/10722/318869 | - |
dc.description.abstract | A new material deposition method to pattern 2D structures with spatial thickness variation using single fixed shadow mask is demonstrated. The method is applied to fabricate multispectral reflective color filter arrays of high customizability. | - |
dc.language | eng | - |
dc.relation.ispartof | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS | - |
dc.title | Material Deposition with Spatial Thickness Variation for Reflective Color Filter | - |
dc.type | Conference_Paper | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.scopus | eid_2-s2.0-85091632681 | - |
dc.identifier.volume | 2020-May | - |
dc.identifier.spage | article no. 9192737 | - |
dc.identifier.epage | article no. 9192737 | - |
dc.identifier.isi | WOS:000612090001231 | - |