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Article: Wafer‐Scale PLD‐Grown High‐κ GCZO Dielectrics for 2D Electronics

TitleWafer‐Scale PLD‐Grown High‐κ GCZO Dielectrics for 2D Electronics
Authors
YU, JGao, GHan, WWei, CTWANG, YLIN, TZHANG, TZheng, ZKi, DZhang, HYNg, MHLiu, HWang, SPWang, HLing, FCC
Issue Date2022
PublisherWiley-VCH GmbH. The Journal's web site is located at http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)2199-160X
Citation
Advanced Electronic Materials, 2022, v. 8 n. 12, p. 2200580:1-8 How to Cite?
DOI: http://dx.doi.org/10.1002/aelm.202200580
Persistent Identifierhttp://hdl.handle.net/10722/324323
ISI Accession Number ID
WOS:000847927800001

 

DC FieldValueLanguage
dc.contributor.authorYU, J-
dc.contributor.authorGao, G-
dc.contributor.authorHan, W-
dc.contributor.authorWei, CT-
dc.contributor.authorWANG, Y-
dc.contributor.authorLIN, T-
dc.contributor.authorZHANG, T-
dc.contributor.authorZheng, Z-
dc.contributor.authorKi, D-
dc.contributor.authorZhang, HY-
dc.contributor.authorNg, MH-
dc.contributor.authorLiu, H-
dc.contributor.authorWang, SP-
dc.contributor.authorWang, H-
dc.contributor.authorLing, FCC-
dc.date.accessioned2023-01-20T06:38:33Z-
dc.date.available2023-01-20T06:38:33Z-
dc.date.issued2022-
dc.identifier.citationAdvanced Electronic Materials, 2022, v. 8 n. 12, p. 2200580:1-8-
dc.identifier.urihttp://hdl.handle.net/10722/324323-
dc.languageeng-
dc.publisherWiley-VCH GmbH. The Journal's web site is located at http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)2199-160X-
dc.relation.ispartofAdvanced Electronic Materials-
dc.titleWafer‐Scale PLD‐Grown High‐κ GCZO Dielectrics for 2D Electronics-
dc.typeArticle-
dc.identifier.emailGao, G: guoyun@hku.hk-
dc.identifier.emailKi, D: dkki@hku.hk-
dc.identifier.emailLing, FCC: ccling@hkucc.hku.hk-
dc.identifier.authorityKi, D=rp02444-
dc.identifier.authorityLing, FCC=rp00747-
dc.identifier.doi10.1002/aelm.202200580-
dc.identifier.hkuros343346-
dc.identifier.volume8-
dc.identifier.issue12-
dc.identifier.spage2200580:1-
dc.identifier.epage8-
dc.identifier.isiWOS:000847927800001-

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